Harmonic Drive
Coating Machine Rotary Table Drive
Hollow-shaft actuator
Due to the smooth running characteristics and compact design FHA hollow-shaft actuators are used in a wide variety of machines applied in the manufacturing of semi-conductors. This design example shows how the FHA actuator is used to drive a rotary table in a coating machine that applies a thin coating to the surface of silicon wafers.
An interesting feature of this design is the way in which various services are passed through the central hollow-shaft of the actuator by means of a rotary feedthrough. At the output side of the actuator ferro-fluidic couplings are used to separate the vacuum chamber, in which the coating process takes place, from the normal environment.
