Harmonic Drive
Wafer-Handling-Robot Primary axes Clean-room
Hollow-shaft actuator
Clean-room specification
Here is another example how Harmonic Drive Units can integrate both primary axis drives in the base unit of a wafer handling robot.
The shoulder joint contains a HFUS-2UH unit with a hollow shaft. The hollow shaft is finished with a standard involute gear and is driven via a spur gear set.
The elbow joint uses a HFUS-2UJ unit driven via a toothed belt. The motor for this joint is also mounted in the base unit of the robot with the driveshaft passing through the hollow shaft. The standard cross roller bearings of these Harmonic Drive Units carry the weight of the robot without requiring further support.
The advantages of this layout result from the reduction in the mass that must be moved. The greatly reduced moment of inertia leads directly to increased dynamic capabilities for the robot.
